Screen LibraryDielectric material integration for microelectronics
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| Corporate Authors: | ; ; |
|---|---|
| Group Author: | |
| Published: |
Electrochemical Society,
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| Publisher Address: | Pennington, NJ |
| Publication Dates: | c1998. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings ; v. 98-3 |
| Subjects: | |
| Carrier Form: | x, 366 p.: ill. ; 23 cm. |
| ISBN: | 1566771978 |
| Index Number: | TM21 |
| CLC: | TM21-532 |
| Call Number: | TM21-532/D561/1998 |
| Contents: |
"This combined volume ... contains material from 2 symposia of the 193rd meeting of the Electrochemical Society, May 3-8, 1998 ... in San Diego ..."--Preface. Includes bibliographical references and index. |