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Micro-opto-electro-mechanical systems：22-23 May 2000, Glasgow, Scotland, United Kingdom

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Bibliographic Details
Corporate Authors: European Optical Society; Institution of Electrical Engineers; Institution of Mechanical Engineers Great Britain; Society of Photo-Optical Instrumentation Engineers
Group Author: Syms Richard R. A
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2000.
Literature type: Book
Language: English
Series: Proceedings EUROPT series ; v. 4075
Subjects:
Optoelectronic devices
Microfabrication
Microelectromechanical systems
Carrier Form: viii, 192 p.: ill. ; 28 cm.
ISBN: 0819437123
Index Number: TH
CLC: TH-39
TN203-532
Call Number: TN203-532/M626/2000
Contents: Includes bibliographical references and index.

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