Cover is for reference only

MOEMS and miniaturized systems III：27-29 January 2003, San Jose, California, USA

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Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International; Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers
Group Author: Krulevitch Peter A; Lakner Hubert K; Smith James H
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2003.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4983
Subjects:
Miniature electronic equipment
Micromechanics
Optics, Adaptive
Optical scanners
Microelectromechanical systems
Carrier Form: xlvi, 368 p.: ill. (some col.) ; 28 cm.
ISBN: 0819447838
Index Number: TN25
CLC: TN25-532
TN305-532
Call Number: TN25-532/M626-1/2003
Contents: Includes bibliographical references and index.

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