MOEMS and miniaturized systems III:27-29 January 2003, San Jose, California, USA
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Corporate Authors: | ; ; ; |
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Group Author: | ; ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash., USA |
Publication Dates: | c2003. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 4983 |
Subjects: | |
Carrier Form: | xlvi, 368 p.: ill. (some col.) ; 28 cm. |
ISBN: | 0819447838 |
Index Number: | TN25 |
CLC: |
TN25-532 TN305-532 |
Call Number: | TN25-532/M626-1/2003 |
Contents: | Includes bibliographical references and index. |