Screen LibraryMeasurement technology for micro-nanometer devices /
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| Main Authors: | |
|---|---|
| Published: |
John Wiley & Sons Singapore Pte. Ltd.,
|
| Publisher Address: | Solaris South Tower, Singapore : |
| Publication Dates: | 2017. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Carrier Form: | xii, 329 pages : illustrations ; 25 cm |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: |
9781118717967 (cloth) : 1118717961 (cloth) 9781118717998 (epub) 1118717996 (epub) 9781118717981 (pdf) 1118717988 (pdf) 9781118717974 111871797X |
| Index Number: | TA418 |
| CLC: |
TN407 TB383 |
| Call Number: | TN407/Z633 |
| Contents: | Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements. |