半导体中离子注入
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Main Authors: | ; ; ; |
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Group Author: | ; |
Published: |
国防工业出版社
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Publisher Address: | 北京 |
Publication Dates: | 1982 |
Literature type: | Book |
Language: | Chinese |
Subjects: | |
Carrier Form: | 245页: ; 21cm |
Index Number: | TN305 |
CLC: | TN305.3 |
Call Number: | TN305.3/2225 |
Contents: | 书名原文:Ion implantation of semiconductors |