Dielectric films for advanced microelectronics

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Bibliographic Details
Group Author: Baklanov Mikhail; Green Martin; Maex Karen
Published: John Wiley & Sons,
Publisher Address: Chichester, England Hoboken, NJ
Publication Dates: c2007.
Literature type: Book
Language: English
Series: Wiley series in materials for electronic and optoelectronic applications
Subjects:
Carrier Form: xxii, 486 p.: ill. ; 26 cm.
ISBN: 9780470013601 (hbk.)
0470013605 (hbk.)
Index Number: TN04
CLC: TN04
TM215.3
Call Number: TM215.3/D561
Contents: Includes bibliographical references and index.