Dielectric films for advanced microelectronics
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Group Author: | ; ; |
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Published: |
John Wiley & Sons,
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Publisher Address: | Chichester, England Hoboken, NJ |
Publication Dates: | c2007. |
Literature type: | Book |
Language: | English |
Series: |
Wiley series in materials for electronic and optoelectronic applications |
Subjects: | |
Carrier Form: | xxii, 486 p.: ill. ; 26 cm. |
ISBN: |
9780470013601 (hbk.) 0470013605 (hbk.) |
Index Number: | TN04 |
CLC: |
TN04 TM215.3 |
Call Number: | TM215.3/D561 |
Contents: | Includes bibliographical references and index. |