Screen LibraryAdvances in chemical-mechanical polishing：symposium held April 13-15, 2004, San Francisco, California, U.S.A.
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| Corporate Authors: | |
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| Group Author: | |
| Published: |
Materials Research Society,
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| Publisher Address: | Warrendale, Pa. |
| Publication Dates: | c2004. |
| Literature type: | Book |
| Language: | English |
| Series: |
Materials Research Society symposium proceedings ; v. 816 |
| Subjects: | |
| Carrier Form: | xi, 292 p.: ill. ; 24 cm. |
| ISBN: | 1558997660 |
| Index Number: | TG17 |
| CLC: | TG17-1 |
| Call Number: | TG17-1/A244/2004 |
| Contents: |
"The papers here were presented at Symposium K, 'Advances in Chemical-Mechanical Polishing,' held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi. Includes bibliographical references and index. |