Advances in chemical-mechanical polishing:symposium held April 13-15, 2004, San Francisco, California, U.S.A.
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Corporate Authors: | |
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Group Author: | |
Published: |
Materials Research Society,
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Publisher Address: | Warrendale, Pa. |
Publication Dates: | c2004. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society symposium proceedings ; v. 816 |
Subjects: | |
Carrier Form: | xi, 292 p.: ill. ; 24 cm. |
ISBN: | 1558997660 |
Index Number: | TG17 |
CLC: | TG17-1 |
Call Number: | TG17-1/A244/2004 |
Contents: |
"The papers here were presented at Symposium K, 'Advances in Chemical-Mechanical Polishing,' held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi. Includes bibliographical references and index. |