Screen LibraryMicromachining and microfabrication process technology and devices：7-9 November 2001, Nanjing, China
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| Group Author: | |
|---|---|
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Wash., USA |
| Publication Dates: | c2001. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 4601 |
| Subjects: | |
| Carrier Form: | xi, 440 p.: ill. ; 30 cm. |
| ISBN: | 0819443409 |
| Index Number: | TH11 |
| CLC: |
TH11-532 TH-39 TH16-532 TB4-532 |
| Call Number: | TH16-532/M626/2001 |
| Contents: | Includes bibliographical references and index. |