Micromachining and microfabrication process technology and devices:7-9 November 2001, Nanjing, China
Saved in:
Group Author: | |
---|---|
Published: |
SPIE,
|
Publisher Address: | Bellingham, Wash., USA |
Publication Dates: | c2001. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 4601 |
Subjects: | |
Carrier Form: | xi, 440 p.: ill. ; 30 cm. |
ISBN: | 0819443409 |
Index Number: | TH11 |
CLC: |
TH11-532 TH-39 TH16-532 TB4-532 |
Call Number: | TH16-532/M626/2001 |
Contents: | Includes bibliographical references and index. |