Screen LibraryMicro- and nanotechnology：materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia
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| Corporate Authors: | ; |
|---|---|
| Group Author: | |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Wash. |
| Publication Dates: | c2007. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE ; v. 6415 |
| Subjects: | |
| ISBN: |
9780819465238 0819465232 |
| Index Number: | TB4 |
| CLC: |
TB4-532 R318-532 |
| Call Number: | R318-532/M626-1/2006 |
| Contents: | Includes bibliographical references and index. |