Micromachining and microfabrication process technology II:14-15 October 1996, Austin, Texas
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Corporate Authors: | ; ; |
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Group Author: | ; |
Published: |
SPIE--The International Society of Optical Engineering,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c1996. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 2879 |
Subjects: | |
Carrier Form: | ix, 366 p.: ill. ; 28 cm. |
ISBN: | 0819422770 |
Index Number: | TH11 |
CLC: |
TH11-532 TB4-532 |
Call Number: | TH11-532/M626.2/1996/ |