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Micromachining and microfabrication process technology II：14-15 October 1996, Austin, Texas

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Bibliographic Details
Corporate Authors: Semiconductor Equipment and Materials International; National Institute of Standards and Technology U.S; Society of Photo-Optical Instrumentation Engineers
Group Author: Chang Shih-Chia; Pang Stella W
Published: SPIE--The International Society of Optical Engineering,
Publisher Address: Bellingham, Wash.
Publication Dates: c1996.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 2879
Subjects:
Microfabrication > Congresses
Electromechanical devices > Design and construction > Congresses
Micromachining > Congresses
Carrier Form: ix, 366 p.: ill. ; 28 cm.
ISBN: 0819422770
Index Number: TH11
CLC: TH11-532
TB4-532
Call Number: TH11-532/M626.2/1996/

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