Silicon front-end junction formation--physics and technology:symposium held April 13-15, 2004, San Francisco, California, U.S.A.
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Corporate Authors: | ; |
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Group Author: | ; |
Published: |
Materials Research Society,
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Publisher Address: | Warrendale, Pa. |
Publication Dates: | c2004. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society symposium proceedings, ; v. 810 |
Subjects: | |
Carrier Form: | xvi, 494 p.: ill. ; 24 cm. |
ISBN: | 1558997601 (hc.) |
Index Number: | TN305 |
CLC: |
TN305-532 O472-532 TN304.1-532 |
Call Number: | TN305-532/S583-1/2004 |
Contents: |
" ... Symposium C, "Silicon Front-End Junction Formation--Physics and Technology," was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--P. xv. Includes bibliographical references and indexes. |