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Rapid thermal and integrated processing VII：symposium held April 13-15, 1998, San Francisco, California, U.S.A.

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Bibliographic Details
Corporate Authors: Materials Research Society
Group Author: 鐿zt鑥rk Mehmet C
Published: Materials Research Society,
Publisher Address: Warrendale, Pennsylvania
Publication Dates: c1998.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 525
Subjects:
Semiconductor doping > Congresses
Vapor-plating > congresses
Rapid thermal processing > Congresses
Semiconductors > Heat treatment > Congresses
Carrier Form: xiii, 403 p.: ill. ; 24 cm.
ISBN: 1558994319
Index Number: TN305
CLC: TN305-532
Call Number: TN305-532/R218/1998/
Contents: Includes bibliographical references and indexes.

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