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Silicon front-end junction formation--physics and technology：symposium held April 13-15, 2004, San Francisco, California, U.S.A.

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Bibliographic Details
Corporate Authors: Symposium on Silicon Front-End Junction Formation--Physics and Technology (2004 San Francisco, Calif.) (San Francisco, Calif.)); Materials Research Society. Meeting (2004 San Francisco, Calif.) (San Francisco, Calif.))
Group Author: (Peter); Pichler P.
Published: Materials Research Society,
Publisher Address: Warrendale, Pa.
Publication Dates: c2004.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings, ; v. 810
Subjects:
Semiconductors > Junctions.
Carrier Form: xvi, 494 p.: ill. ; 24 cm.
ISBN: 1558997601 (hc.)
Index Number: TN305
CLC: TN305-532
O472-532
TN304.1-532
Call Number: TN305-532/S583-1/2004
Contents: " ... Symposium C, "Silicon Front-End Junction Formation--Physics and Technology," was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--P. xv.
Includes bibliographical references and indexes.

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