Ultra clean processing of silicon surfaces:proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98), held in Ostend, Belgium, September 21-23, 1998
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
Scitec Distributed in the Americas by Trans Tech Publications,
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Publisher Address: | Uetikon-Zuerich, Switzerland Enfield, N.H. |
Publication Dates: | c1999. |
Literature type: | Book |
Language: | English |
Series: |
Solid state phenomena ; v. 65-66 |
Subjects: | |
Carrier Form: | xiv, 301 p.: ill. ; 25 cm. |
ISBN: | 3908450403 |
Index Number: | TN305 |
CLC: | TN305.2-532 |
Call Number: | TN305.2-532/I617/1998 |
Contents: | Includes bibliographical references and indexes. |