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Ultra clean processing of silicon surfaces：proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98), held in Ostend, Belgium, September 21-23, 1998

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Bibliographic Details
Corporate Authors: International Symposium on Ultra Clean Processing of Silicon Surfaces (4th 1998 Ostend, Belgium
Group Author: Meuris Marc; Mertens Paul; Heyns Marc
Published: Scitec Distributed in the Americas by Trans Tech Publications,
Publisher Address: Uetikon-Zuerich, Switzerland Enfield, N.H.
Publication Dates: c1999.
Literature type: Book
Language: English
Series: Solid state phenomena ; v. 65-66
Subjects:
Contamination control
Silicon surfaces
Carrier Form: xiv, 301 p.: ill. ; 25 cm.
ISBN: 3908450403
Index Number: TN305
CLC: TN305.2-532
Call Number: TN305.2-532/I617/1998
Contents: Includes bibliographical references and indexes.

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