Screen LibraryDevelopment of high performance piezoelectric AlScN for microelectromechanical systems : towards a ferroelectric wurtzite structure /
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| Main Authors: | |
|---|---|
| Published: |
BoD, Books on Demand,
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| Publisher Address: | Norderstedt : |
| Publication Dates: | 2019. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Item Description: | A thesis submitted for the degree of Doctor of Engineering (Dr. Ing.) at the Technical Faculty, Kiel University. |
| Carrier Form: | xix, 158 pages : illustrations, forms ; 21 cm |
| Bibliography: | Includes bibliographical references (pages 141-156). |
| ISBN: |
9783750431423 (paperback) : 3750431426 (paperback) |
| CLC: | TN4 |
| Call Number: | TN4/F445 |