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Rapid thermal and laser processing：24-25 September 1992, San Jose, California

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Bibliographic Details
Group Author: Muller Heinrich G.; Kwong Dim-Lee.
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c1993.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 1804
Subjects:
Semiconductor doping > Congresses.
Semiconductor industry > Laser use in > Congresses.
Plasma-enhanced chemical vapor deposition > Congresses.
Multichip modules (Microelectronics) > Design and construction > Congresses.
Semiconductors > Heat treatment > Congresses.
Carrier Form: vii, 167 p.: ill. ; 28 cm.
ISBN: 0819410020
Index Number: TN405
CLC: TN405-532
Call Number: TN405-532/R218/1992/
Contents: Includes bibliographical references and index.

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