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Rapid thermal and integrated processing, 10-11 September 1991, San Jose, California

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Bibliographic Details
Group Author: Singh Rajendra 1946-; Kwong Dim-Lee; Moslehi Mehrdad M
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c1992.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 1595
Subjects:
Semiconductor doping > Congresses
Vapor-plating > congresses
Semiconductors > Heat treatment > Congresses
Carrier Form: ix, 207 p.: ill. ; 28 cm.
ISBN: 0819407267
Index Number: TN305
CLC: TN305-532
Contents: "Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix.
Includes bibliographical references and index.

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