Proceedings of the eleventh International Symposium on Plasma Processing

Corporate Authors: Symposium on Plasma Processing (11th 1996 Los Angeles, California; Electrochemical Society. Meeting 1996 Los Angeles, California); Electrochemical Society. Dielectric Science and Technology Division; International Symposium on Plasma Processing 1996 Los Angeles, California); Electrochemical Society. Electronics Division
Group Author: Mathad G. S; Meyyappan M
Published: Electrochemical Society.
Publication Dates: c1996.
Call Number: O539-532/S989/1996/