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Proceedings of the eleventh International Symposium on Plasma Processing

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Bibliographic Details
Corporate Authors: Symposium on Plasma Processing (11th 1996 Los Angeles, California; Electrochemical Society. Meeting 1996 Los Angeles, California); Electrochemical Society. Dielectric Science and Technology Division; International Symposium on Plasma Processing 1996 Los Angeles, California); Electrochemical Society. Electronics Division
Group Author: Mathad G. S; Meyyappan M
Published: Electrochemical Society.
Publisher Address: Pennington, NJ
Publication Dates: c1996.
Literature type: Book
Language: English
Series: Proceedings ; v. 96-12
Subjects:
Semiconductors > Etching > Congressses
Plasma etching
Carrier Form: xi, 720 p.: ill. ; 23 cm.
ISBN: 1566771641
Index Number: O539
CLC: O539-532
TN405-532
Call Number: O539-532/S989/1996/
Contents: "Dielectric Science and Technology and Electronics Divisions."
Spine title: Plasma processing XI.
"This proceedings volume contains the papers presented at the Eleventh Symposium on Plasma Processing, held in Los Angeles, CA, May 5-10, 1996. ... as part of the 198th Meeting of the Electrochemical Society, Inc., Pennington, NJ."--Preface.
Includes bibliographical references and indexes.

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