Screen LibrarySemiconductor cleaning technology, 1989：proceedings of the..., [held at the Electrochemical Society Fall Meeting in Hollywood, Florida, Oct. 15-20, 1989]
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| Corporate Authors: | |
|---|---|
| Group Author: | ; |
| Published: |
Electrochemical Society,
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| Publisher Address: | Pennington, NJ |
| Publication Dates: | c1990. |
| Literature type: | Book |
| Language: | English |
| Series: |
Electrochemical Society proceedings ; v. 90-9 |
| Subjects: | |
| Carrier Form: | x, 399 p.: ill. ; 23 cm. |
| Index Number: | TN605 |
| CLC: | TN605-532 |
| Call Number: | TN605-53/I61.2/1989/ |
| Contents: |
"Held at the Electrochemical Society Fall Meeting in Hollywood, Florida, October 15-20, 1989"--P. iii. Includes bibliographical references and indexes. |