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Ultra clean processing of silicon surfaces V [i.e. VI]：proceedings of the Fifth [i.e. Sixth] International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2002), held in Ostend, Belgium, September 2002

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Bibliographic Details
Corporate Authors: International Symposium on Ultra Clean Processing of Silicon Surfaces (6th 2002 Ostend, Belgium
Group Author: Mertens Paul; Meuris Marc; Heyns Marc
Published: Scitec Publications Distributed in the Americas by Trans Tech Publications,
Publisher Address: Uetikon-Zuerich, Switzerland Enfield, NH, USA
Publication Dates: c2003.
Literature type: Book
Language: English
Series: Solid state phenomena ; v. 92
Subjects:
Surface contamination
Sterilization
Silicon > Surfaces
Carrier Form: xiii, 311 p.: ill. ; 26 cm.
ISBN: 3908450780
Index Number: TN305
CLC: TN305.2-532
Call Number: TN305.2-532/I617/2002
Contents: Held September 16-18, 2002.
Includes bibliographical references and indexes.

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