Screen Library15th Annual Symposium on Photomask Technology and Management：20-22 September, 1995, Santa Clara, California
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| Corporate Authors: | ; ; |
|---|---|
| Group Author: | ; |
| Published: |
SPIE,
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| Publisher Address: | Bellingham, Wash. |
| Publication Dates: | c1995. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 2621 |
| Subjects: | |
| Carrier Form: | ix, 636 p.: ill. ; 28 cm. |
| ISBN: | 0819419850 |
| Index Number: | TN305 |
| CLC: | TN305.7-532 |
| Call Number: | TN305.7-532/S989/1995/ |
| Contents: | Includes bibliographic references and author index. |