Plasma diagnostics /

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Bibliographic Details
Corporate Authors: Elsevier Science & Technology.
Group Author: Auciello, Orlando, 1945-; Flamm, Daniel L.
Published: Academic Press,
Publisher Address: Boston :
Publication Dates: 1989.
Literature type: eBook
Language: English
Series: Plasma--materials interactions
Subjects:
Online Access: http://www.sciencedirect.com/science/book/9780120676354
Carrier Form: 1 online resource (2 volumes) : illustrations.
Bibliography: Includes bibliographical references and indexes.
Index Number: QC718
CLC: O53
Contents: v. 1. Discharge parameters and chemistry -- v. 2. Surface analysis and interactions.