Plasma diagnostics /
Saved in:
Corporate Authors: | |
---|---|
Group Author: | ; |
Published: |
Academic Press,
|
Publisher Address: | Boston : |
Publication Dates: | 1989. |
Literature type: | eBook |
Language: | English |
Series: |
Plasma--materials interactions
|
Subjects: | |
Online Access: |
http://www.sciencedirect.com/science/book/9780120676354 |
Carrier Form: | 1 online resource (2 volumes) : illustrations. |
Bibliography: | Includes bibliographical references and indexes. |
Index Number: | QC718 |
CLC: | O53 |
Contents: | v. 1. Discharge parameters and chemistry -- v. 2. Surface analysis and interactions. |