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Chemical perspectives of microelectronic materials：symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.

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Bibliographic Details
Group Author: Jasinski Joseph M; Yates John T 1935-; Gross Mihal E
Published: Materials Research Society,
Publisher Address: Pittsburgh, Pa.
Publication Dates: c1989.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 131
Subjects:
Semiconductors > Congresses
Surface chemistry > Congresses
Microelectronics > Materials > Congresses
Carrier Form: xv, 642 p.: ill. ; 24 cm.
ISBN: 1558990046
Index Number: TN4
CLC: TN4-532
Call Number: TN4-53/C517/1988/
Contents: Includes bibliographical references and indexes.

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