Chemical perspectives of microelectronic materials:symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.
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Group Author: | ; ; |
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Published: |
Materials Research Society,
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Publisher Address: | Pittsburgh, Pa. |
Publication Dates: | c1989. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society symposium proceedings ; v. 131 |
Subjects: | |
Carrier Form: | xv, 642 p.: ill. ; 24 cm. |
ISBN: | 1558990046 |
Index Number: | TN4 |
CLC: | TN4-532 |
Call Number: | TN4-53/C517/1988/ |
Contents: | Includes bibliographical references and indexes. |