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Principles of plasma discharges and materials processing /

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Bibliographic Details
Main Authors: Lieberman, M. A. (Michael A.)
Corporate Authors: Wiley Online Library (Online service)
Group Author: Lichtenberg, Allan J.
Published: Wiley-Interscience,
Publisher Address: Hoboken, N.J. :
Publication Dates: 2005.
Literature type: eBook
Language: English
Edition: Second edition.
Subjects:
Plasma dynamics.
Thin films > Surfaces.
Plasma etching.
Plasma chemistry > Industrial applications.
Electronic books.
Online Access: https://onlinelibrary.wiley.com/book/10.1002/0471724254
Item Description: Description based on print version record.
Carrier Form: 1 online resource (xxxv, 757 pages) : illustrations
Also available in print.
Bibliography: Includes bibliographical references (pages 735-748) and index.
ISBN: 9780471724254 (electronic bk.)
0471720011 (hardcover)
9780471720010 :
Index Number: QC718
CLC: O461

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