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Electrochemical processing in ULSI fabricatrion III：proceedings of the International Symposium

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Bibliographic Details
Corporate Authors: Symposium on Electrochemical Processing in ULSI Fabrication (3rd 2000 Toronto, Ont; Electrochemical Society. Electronics Division; Electrochemical Society. Meeting 2000 Toronto, Ont.); Electrochemical Society. Electrodeposition Division; Electrochemical Society. Dielectric Science and Technology Division
Group Author: Andricacos Panayotis C 1951-
Published: Electrochemical Society,
Publisher Address: Pennington, N.J.
Publication Dates: c2002.
Literature type: Book
Language: English
Series: Proceedings ; v. 2000-8
Subjects:
Semiconductors > Design and construction
Dielectrics
Electrochemical metallizing
Electric contacts
Integrated circuits > Ultra large scale integration > Design and construction
Integrated circuits > Ultra large scale integration > Materials
Carrier Form: viii, 258 p.: ill. ; 23 cm.
ISBN: 1566772737
Index Number: TN470
CLC: TN470.5-532
Call Number: TN470.5-532/S989/2000
Contents: "Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Includes bibliographical references and indexes.

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