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Author: Behringer,Uwe

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20th European Conference on Mask Technology for Integrated Circuits and Microcomponents：12-14 January 2004, Dresden, Germany

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Bibliographic Details
Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (20th 2004 Dresden, Germany; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; SEMI-Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2004.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5504
Subjects:
Microlithography
Integrated circuits > Masks
Carrier Form: xxiv, 210 p.: ill. ; 28 cm.
ISBN: 0819454370
Index Number: TN405
CLC: TN405.7-532
Call Number: TN405.7-532/E89/2004
Contents: Includes bibliographical references and index.

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