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1

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20th European Conference on Mask Technology for Integrated Circuits and Microcomponents：12-14 January 2004, Dresden, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (20th 2004 Dresden, Germany; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; SEMI-Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c2004.
Call Number: TN405.7-532/E89/2004

Book

2

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17th European Conference on Mask Technology for Integrated Circuits and Microcomponents：proceedings : 13-14 November, 2000, Munich, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (17th 2001 Munich, Germany; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c2001.
Call Number: TN405.7-532/E89/2000

Book

3

Cover is for reference only

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents：15-16 November 1999, Munich, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th 1999 Munich, Germany; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c2000.
Call Number: TN405.7-532/E89/1999

Book

4

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15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98：16-17 November 1998, Munich-Unterhaching, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th 1998 Munich-Unterhaching; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; SEMI-Europe; BACUS Technical group; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft fur Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c1999.
Call Number: TN405.7-532/E89/1998/

Book

5

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37th European Mask and Lithography Conference : 20-23 June, 2022, Leuven, Belgium /

Corporate Authors: European Mask and Lithography Conference Leuven, Belgium); SPIE (Society) (organizing body.); VDE/VDI GMM - the Society for Microelectronics (organizing body.); Microsystems and Precision Engineering (Germany) (organizing body.); UBC Microelectronics (Germany)
Group Author: Behringer, Uwe (Editor)
Published: SPIE,
Publication Dates: [2022]
Call Number: TN305.7-532/E897/2022

Book

6

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27th European Mask and Lithography Conference：18-19 January 2011, Dresden, Germany

Corporate Authors: European Mask and Lithography Conference (27th 2011 Dresden, Germany; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik; SPIE Society
Group Author: Behringer Uwe F. W
Published: SPIE,
Publication Dates: c2011.
Call Number: TN305.7-532/E897/2011

Book

7

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25th European Mask and Lithography Conference : 12-15 January 2009, Dresden, Germany

Corporate Authors: European Mask and Lithography Conference (25th 2009 Dresden, Germany; BACUS Technical group; SPIE Society; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe F. W
Published: SPIE,
Publication Dates: c2009.
Call Number: TN305.7-532/E897/2009

Book

8

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EMLC 2006：22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany

Corporate Authors: European Mask and Lithography Conference (22nd 2006 Dresden, Germany; BACUS Technical group; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft f··ur Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe F. W
Published: SPIE,
Publication Dates: c2006.
Call Number: TN305.7-532/E897/2006

Book

9

Cover is for reference only

EMLC 2005：21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (21st 2005 Dresden, Germany; Institut f··ur Mikrostrukturtechnik; SEMI-Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft f··ur Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe F. W
Published: SPIE VDE Verlag GmbH,
Publication Dates: c2005.
Call Number: TN305.7-532/E897/2005

Book

10

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MEMS/MOEMS：advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium

Corporate Authors: European Optical Society; Society of Photo-Optical Instrumentation Engineers
Group Author: Behringer Uwe F. W
Published: SPIE,
Publication Dates: c2003.
Call Number: TN25-532/M626-3/2002

Book

11

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19th European Conference on Mask Technology for Integrated Circuits and Microcomponents：13-15 January, 2003, Sonthofen, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (19th 2003: Sonthofen, Germany; Semiconductor Equipment and Materials Institute. Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe F. W
Published: SPIE,
Publication Dates: c2003.
Call Number: TN405.7-532/E89/2003

Book

12

Cover is for reference only

18th European Conference on Mask Technology for Integrated Circuits and Microcomponents：proceedings : 15-16 January, 2002, Munich, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (18th 2002 Munich, Germany; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe F. W
Published: SPIE,
Publication Dates: c2002.
Call Number: TN405.7-532/E89/2002

Book

13

Cover is for reference only

35th European Mask and Lithography Conference : (EMLC 2019) : 17-19 June 2019, Dresden, Germany /

Corporate Authors: European Mask and Lithography Conference Dresden, Germany; VDE/VDI GMM - the Society for Microelectronics; Microsystems and Precision Engineering Germany; SPIE Society
Group Author: Behringer, Uwe F. W; Finders, Jo
Published: SPIE,
Publication Dates: [2019]
Call Number: TN305.7-532/E897/2019

Book

14

Cover is for reference only

34th European Mask and Lithography Conference : 18-20 June 2018, Grenoble, France /

Corporate Authors: European Mask and Lithography Conference Grenoble, France; VDE/VDI GMM - the Society for Microelectronics; Microsystems and Precision Engineering Germany; SPIE Society
Group Author: Behringer, Uwe F. W; Finders, Jo
Published: SPIE,
Publication Dates: [2018]
Call Number: TN305.7-532/E897/2018

Book

15

Cover is for reference only

33rd European Mask and Lithography Conference : 26-28 June 2017, Dresden, Germany /

Corporate Authors: European Mask and Lithography Conference Dresden, Germany; VDE/VDI GMM - the Society for Microelectronics; Microsystems and Precision Engineering Germany; SPIE Society
Group Author: Behringer, Uwe F. W; Finders, Jo
Published: SPIE,
Publication Dates: [2017]
Call Number: TN305.7-532/E897/2017

Book

16

Cover is for reference only

32nd European Mask and Lithography Conference : 21-22 June 2016, Dresden, Germany /

Corporate Authors: European Mask and Lithography Conference Dresden, Germany; VDE/VDI GMM - the Society for Microelectronics; Microsystems and Precision Engineering Germany; SPIE Society
Group Author: Behringer, Uwe F. W; Finders, Jo
Published: SPIE,
Publication Dates: [2016]
Call Number: TN305.7-532/E897/2016

Book

17

Cover is for reference only

31st European Mask and Lithography Conference : 22-23 June 2015, Eindhoven, Netherlands /

Corporate Authors: European Mask and Lithography Conference Eindhoven, Netherlands; Micro- and Precision Engineering Germany
Group Author: Behringer, Uwe F. W; Finders, Jo
Published: SPIE,
Publication Dates: [2015]
Call Number: TN305.7-532/E897/2015

Book

18

Cover is for reference only

30th European Mask and Lithography conference : 24-25 June 2014, Dresden, Germany /

Corporate Authors: European Mask and Lithography Conference Dresden, Germany; SPIE Society; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer, Uwe F. W; Maurer, Wilhelm
Published: SPIE,
Publication Dates: [2014]
Call Number: TN305.7-532/E897/2014

Book

19

Cover is for reference only

29th European Mask and Lithography Conference : 25-27 June 2013, Dresden, Germany /

Corporate Authors: European Mask and Lithography Conference Dresden, Germany; SPIE Society
Group Author: Behringer, Uwe F. W; Maurer, Wilhelm
Published: SPIE,
Publication Dates: [2013]
Call Number: TN305.7-532/E897/2013

Book

20

Cover is for reference only

28th European Mask and Lithography Conference：17-18 January 2012, Dresden, Germany

Corporate Authors: European Mask and Lithography Conference (28th 2012 Dresden, Germany; SPIE Society
Group Author: Behringer Uwe F. W; Maurer Wilhelm
Published: SPIE,
Publication Dates: c2012.
Call Number: TN305.7-532/E897/2012

Book

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