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Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (21st 2005 Dresden, Germany; Institut f··ur Mikrostrukturtechnik; SEMI-Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft f··ur Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe F. W
Published: SPIE VDE Verlag GmbH,
Publication Dates: c2005.
Call Number: TN305.7-532/E897/2005

Book

2

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Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (20th 2004 Dresden, Germany; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; SEMI-Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c2004.
Call Number: TN405.7-532/E89/2004

Book

3

Cover is for reference only

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th 1998 Munich-Unterhaching; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; SEMI-Europe; BACUS Technical group; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft fur Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c1999.
Call Number: TN405.7-532/E89/1998/

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