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1

Cover is for reference only

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (17th 2001 Munich, Germany; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c2001.
Call Number: TN405.7-532/E89/2000

Book

2

Cover is for reference only

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (16th 1999 Munich, Germany; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c2000.
Call Number: TN405.7-532/E89/1999

Book

3

Cover is for reference only

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (20th 2004 Dresden, Germany; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; SEMI-Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c2004.
Call Number: TN405.7-532/E89/2004

Book

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