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Author Results for BACUS (Technical group)

Cover is for reference only

Photomask technology 2007：18-21 September, 2007, Monterey, California, USA

Corporate Authors: Society of Photo-Optical Instrumentation Engineers; BACUS Technical group
Group Author: Kawahira Hiroichi; Naber Robert J
Published: SPIE,
Publication Dates: c2007.
Call Number: TN405.7-532/S989/2007/v.3

Book

Cover is for reference only

Photomask technology 2006：19-22 September, 2006, Monterey, California, USA

Corporate Authors: Symposium on Photomask Technology; BACUS Technical group; Society of Photo-Optical Instrumentation Engineers
Group Author: Martin Patrick M; Naber Robert J
Published: SPIE,
Publication Dates: c2006.
Call Number: TN405.7-532/S989/2006/pt.1

Book

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