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1
Extreme ultraviolet lithography /

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Main Authors: Levinson, Harry J.
Corporate Authors: Society of Photo-optical Instrumentation Engineers.
Published: SPIE Press,
Publication Dates: [2020]
Call Number: TN41/L665
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2
EUV lithography /

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Group Author: Bakshi, Vivek
Published: SPIE Press,
Publication Dates: [2018]
Call Number: TN41/E969/2nd ed.
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6
Computational lithography

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Main Authors: Ma, Xu, 1983
Corporate Authors: Wiley InterScience Online service
Group Author: Arce, Gonzalo R
Published:
Electronic eBook
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7
International symposium on Extreme ultraviolet lithography 2010, Kobe, Japan, 17-20 October 2010.

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Published: SEMATECH,
Publication Dates: c2010.
Call Number: TN41-532/I617/2010
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8
Extreme ultraviolet (EUV) lithography 22-25 February 2010, San Jose, California, United States

Cover is for reference only
Corporate Authors: SPIE Society; SEMATECH Organization
Group Author: La Fontaine Bruno M
Published: SPIE,
Publication Dates: 2010.
Call Number: TN41-532/E969/2010
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9
Computational lithography

Cover is for reference only
Main Authors: Ma Xu, 1983-
Group Author: Arce Gonzalo R.
Published: Wiley,
Publication Dates: c2010.
Call Number: TN305.7/M111
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11
Periodic materials and interference lithography for photonics, phononics and mechanics

Cover is for reference only
Main Authors: Maldovan Martin.
Group Author: Thomas Edwin L.
Published: Wiley-VCH John Wiley [distributor],
Publication Dates: c2009.
Call Number: TS823/M244
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12
EUV lithography

Cover is for reference only
Group Author: Bakshi Vivek
Published: SPIE Press John Wiley,
Publication Dates: c2009.
Call Number: TN41/E969
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18
Photopolymerisation and photoimaging science and technology

Cover is for reference only
Group Author: Allen Norman S
Published: Elsevier Applied Science,
Publication Dates: c1989.
Call Number: O621.3/P575.1/
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19
Optical/laser microlithography 2-4 March 1988

Cover is for reference only
Corporate Authors: Society of Photo-optical Instrumention Engineers
Group Author: Lin Burn Jeng 1942-
Published: SPIE,
Publication Dates: c1988.
Call Number: TS82-53/O62.1/1988
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