Device and process technologies for MEMS and microelectronics：27-29 October 1999, Royal Pines Resort, Queensland, Australia

Corporate Authors: Institution of Radio and Electronics Engineers, Australia; Queensland. Government State Development; Griffith University Microelectronics Engineering Society; Society of Photo-Optical Instrumentation Engineers
Group Author: Dimitrijev Sima 1958-; Chau Kevin
Published: SPIE,
Publication Dates: c1999.
Call Number: TM380.5-532/D492/1999/