Design, characterization, and packaging for MEMS and microelectronics：27-29 October 1999, Royal Pines Resort, Queensland, Australia

Corporate Authors: Institution of Radio and Electronics Engineers, Australia.; Queensland. Government State Development.; Griffith University Microelectronics Engineering Society.; Society of Photo-Optical Instrumentation Engineers
Group Author: (Bernard); Demidenko Serge.; Courtois B.
Published: SPIE,
Publication Dates: c1999.
Call Number: TM380.2-532/D457/1999/