16th Annual Symposium on Photomask Technology and Management：proceedings : 18-20 September, 1996, Redwood City, California

Corporate Authors: Symposium on Photomask Technology and Management. Annual (16th 1996 Redwood City, Calif; Society of Photo-Optical Instrumentation Engineers; BACUS Technical group
Group Author: Reynolds James A 1930-; Shelden Gilbert V
Published: SPIE,
Publication Dates: c1996.
Call Number: TN305.7-532/S989/1996/