Micromachining and microfabrication process technology XI:25 January, 2005, San Jose, California, USA
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2006. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 6109 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: | 0819461512 |
Index Number: | TH11 |
CLC: | TH11-532 |
Call Number: | TH11-532/M626.2/2006 |
Contents: | Includes bibliographical references and author index. |