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Micromachining and microfabrication process technology XI：25 January, 2005, San Jose, California, USA

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Stewart Harold D; Chiao Jung-Chih; Perez-Maher Mary Ann
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2006.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 6109
Subjects:
Microfabrication
Electromechanical devices > Design and construction
Micromachining
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 0819461512
Index Number: TH11
CLC: TH11-532
Call Number: TH11-532/M626.2/2006
Contents: Includes bibliographical references and author index.

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