Proceedings of the 7th Symposium on Plasma Processing

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Bibliographic Details
Corporate Authors: Symposium on Plasma Processing (7th 1988 Atlanta, Ga
Group Author: Mathad G. S; Schwartz G. C; Hess Dennis W
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1988.
Literature type: Book
Language: English
Series: Proceedings / the Electrochemical Society, Inc ; v. 88-22
Subjects:
Carrier Form: viii, 400 p.: ill. ; 23 cm.
Index Number: O539
CLC: O539-532
Call Number: O539-53/S989/1988/
Contents: This volume contains the papers presented at the 7th Symposium on Plasma Processing held in Atlanta, GA, May 15-20, 1988.
Spine title: Plasma processing.
Includes bibliographies and indexes.