Proceedings of the 7th Symposium on Plasma Processing
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1988. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings / the Electrochemical Society, Inc ; v. 88-22 |
Subjects: | |
Carrier Form: | viii, 400 p.: ill. ; 23 cm. |
Index Number: | O539 |
CLC: | O539-532 |
Call Number: | O539-53/S989/1988/ |
Contents: |
This volume contains the papers presented at the 7th Symposium on Plasma Processing held in Atlanta, GA, May 15-20, 1988. Spine title: Plasma processing. Includes bibliographies and indexes. |