Semiconductor cleaning technology, 1989:proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
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Corporate Authors: | ; ; |
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Group Author: | ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1990. |
Literature type: | Book |
Language: | English |
Series: |
Electrochemical Society. Proceedings ; v. 90-9 |
Subjects: | |
Carrier Form: | x, 399 p.: ill. ; 23 cm. |
Index Number: | TN305 |
CLC: | TN305-532 |
Call Number: | TN305-53/I61.3/1989/ |
Contents: |
"Held at the Electrochemical Society Fall Meeting in Hollywood, Florida, October 15-20, 1989"--P. iii. Includes bibliographical references and indexes. |