Cover is for reference only

Principles of plasma discharges and materials processing

"The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals." "Th...

Full description

Saved in:
Bibliographic Details
Main Authors: Lieberman, M. A. (Michael A.)
Group Author: Lichtenberg, Allan J.
Published:
Literature type: Electronic eBook
Language: English
Edition: 2nd ed.
Subjects:
Plasma dynamics.
Thin films > Surfaces.
Plasma etching.
Plasma chemistry > Industrial applications.
SCIENCE > General. > General.
SCIENCE > Energy.
Electronic Materials.
FACsci
ER > Internet > Book > Full text
Electronic books.
Online Access: http://onlinelibrary.wiley.com/book/10.1002/0471724254
Summary: "The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals." "The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters." "With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever."--Jacket.
Carrier Form: 1 online resource (xxxv, 757 pages) : illustrations
Bibliography: Includes bibliographical references (pages 735-748) and index.
ISBN: 0471724246
9780471724247
9780471720010
0471720011
0471724254
9780471724254
Index Number: QC718
CLC: O53
Contents: Basic plasma equations and equilibrium -- Atomic collisions -- Plasma dynamics -- Diffusion and transport -- Direct current (DC) sheaths -- Chemical reactions and equilibrium -- Molecular collisions -- Chemical kinetics and surface processes -- Particle and energy balance in discharges -- Capacitive discharges -- Inductive discharges -- Wave-heated discharges -- Direct current (DC) discharges -- Etching -- Deposition and implantation -- Dusty plasmas -- Kinetic theory of discharges.

Related Book Recommendations