馆藏书目查询系统 - 上海图书馆

1

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Photomask technology 2006：19-22 September, 2006, Monterey, California, USA

Corporate Authors: Symposium on Photomask Technology; BACUS Technical group; Society of Photo-Optical Instrumentation Engineers
Group Author: Martin Patrick M; Naber Robert J
Published: SPIE,
Publication Dates: c2006.
Call Number: TN405.7-532/S989/2006/pt.1

Book

2

Cover is for reference only

Advanced microlithography technologies：8-10 November, 2004, Beijing, China

Corporate Authors: Zhongguo guang xue xue hui; Australian Optical Society; Guo jia zi ran ke xue ji jin wei yuan hui China; Society of Photo-Optical Instrumentation Engineers
Group Author: Yao Jun'en; Progler Christopher J; Wang Yangyuan
Published: SPIE,
Publication Dates: c2005.
Call Number: TN405.7-532/A244/2004

Book

3

Cover is for reference only

Metrology, inspection, and process control for microlithography XIX：28 February-3 March, 2005, San Jose, California, USA

Corporate Authors: International SEMATECH; Society of Photo-Optical Instrumentation Engineers
Group Author: Silver Richard M
Published: SPIE,
Publication Dates: c2005.
Call Number: TN405.7-532/M594/2005

Book

4

Cover is for reference only

25th Annual BACUS Symposium on Photomask Technology：4-7 October, 2005, Monterey, California, USA

Corporate Authors: Symposium on Photomask Technology (25th 2005 Monterey, California; BACUS Technical group; Society of Photo-Optical Instrumentation Engineers
Group Author: Weed J., Tracy; Martin Patrick M
Published: SPIE,
Publication Dates: c2005.
Call Number: TN405.7-532/S989/2005

Book

5

Cover is for reference only

Optical fibers and passive components：APOC 2003 : Asia-Pacific optical and wireless communications : 4-6 November, 2003, Wuhan, China

Corporate Authors: APOC 2003 (2003 Wuhan, China; Zhongguo guang xue xue hui; Wuhan Municipal Government China; Wuhan East Lake High-Tech Development Zone China. Administration Commission; Society of Photo-Optical Instrumentation Engineers
Group Author: Shen Steve I. Y
Published: SPIE,
Publication Dates: c2004.
Call Number: TN929.1-532/O626/2003

Book

6

Cover is for reference only

Optoelectronic integration on silicon：27-28 January 2004, San Jose, California, USA

Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Jabbour Ghassan E; Robbins David J
Published: SPIE,
Publication Dates: c2004.
Call Number: TN431-532/O629/2004

Book

7

Cover is for reference only

Optoelectronic integrated circuits VI：26 January 2004, San Jose, California, USA

Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Eldada Louay A
Published: SPIE,
Publication Dates: c2004.
Call Number: TN491-532/O62/2004

Book

8

Cover is for reference only

Optical microlithography XVII：24-27 February 2004, Santa Clara, California, USA

Corporate Authors: Semiconductor Equipment and Materials International; International SEMATECH; Society of Photo-Optical Instrumentation Engineers
Group Author: Smith Bruce W 1959-
Published: SPIE,
Publication Dates: c2004.
Call Number: TS828-532/O62/2004/v.1

Book

9

Cover is for reference only

Integrated optics and photonic integrated circuits：27-29 April, 2004, Strasbourg, France

Corporate Authors: European Optical Society; Society of Photo-Optical Instrumentation Engineers
Group Author: Honkanen Seppo; Righini Giancarlo C
Published: SPIE,
Publication Dates: c2004.
Call Number: TN25-532/I611/2004

Book

10

Cover is for reference only

Metrology, inspection, and process control for microlithography XVIII：23-26 February, 2004, Santa Clara, California, USA

Corporate Authors: Semiconductor Equipment and Materials International; International SEMATECH; Society of Photo-Optical Instrumentation Engineers
Group Author: Silver Richard M
Published: SPIE,
Publication Dates: c2004.
Call Number: TN405.7-532/M594/2004

Book

11

Cover is for reference only

20th European Conference on Mask Technology for Integrated Circuits and Microcomponents：12-14 January 2004, Dresden, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (20th 2004 Dresden, Germany; Forschungszentrum Karlsruhe. Institute for Microstructure Technology; SEMI-Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe
Published: SPIE,
Publication Dates: c2004.
Call Number: TN405.7-532/E89/2004

Book

12

Cover is for reference only

Design and process integration for microelectronic manufacturing II [sic]：26-27 February 2004, Santa Clara, California, USA

Corporate Authors: Semiconductor Equiment and Materials International; International SEMATECH; Society of Photo-Optical Instrumentation Engineers
Group Author: Liebmann Lars W
Published: SPIE,
Publication Dates: c2004.
Call Number: TN4-532/D457/2004

Book

13

Cover is for reference only

Photomask and next-generation lithography mask technology XI：14-16 April, 2004, Yokohama, Japan

Corporate Authors: BACUS (Technical group); Institute of Electrical and Electronics Engineers. Japan Section.; Semiconductor Equipment and Materials International (Japan); Society of Photo-Optical Instrumentation Engineers; Photomask Japan.
Published: SPIE,
Publication Dates: c2004.
Call Number: TN305.7-532/P757/2004

Book

14

Cover is for reference only

24th Annual BACUS Symposium on Photomask Technology：14-17 September, 2004, Monterey, California, USA

Corporate Authors: Symposium on Photomask Technology (24th 2004 Monterey, Calif; BACUS Technical group; Society of Photo-Optical Instrumentation Engineers
Group Author: Staud Wolfgang; Weed J., Tracy
Published: SPIE,
Publication Dates: c2004.
Call Number: TN405.7-532/S989/2004

Book

15

Cover is for reference only

Photomask and next-generation lithography mask technology X：16-18 April, 2003, Yokohama, Japan

Corporate Authors: BACUS (Technical group); Ōyō Butsuri Gakkai.; Semiconductor Equipment and Materials International (Japan); Society of Photo-Optical Instrumentation Engineers; Photomask Japan.
Group Author: Tanabe Hiroyoshi.
Published: SPIE,
Publication Dates: c2003.
Call Number: TN305.7-532/P757/2003

Book

16

Cover is for reference only

Optical microlithography XVI：25-28 February 2003, Santa Clara, California, USA

Corporate Authors: Semiconductor Equipment and Materials International; International SEMATECH; Society of Photo-Optical Instrumentation Engineers
Group Author: Yen Anthony
Published: SPIE,
Publication Dates: c2003.
Call Number: TS828-532/O62/2003/v.1

Book

17

Cover is for reference only

Design and process integration for microelectronic manufacturing II：26-28 February 2003, Santa Clara, California, USA

Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Starikov Alexander 1952-
Published: SPIE,
Publication Dates: c2003.
Call Number: TN4-532/D457/2003

Book

18

Cover is for reference only

19th European Conference on Mask Technology for Integrated Circuits and Microcomponents：13-15 January, 2003, Sonthofen, Germany

Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents (19th 2003: Sonthofen, Germany; Semiconductor Equipment and Materials Institute. Europe; Society of Photo-Optical Instrumentation Engineers; VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Group Author: Behringer Uwe F. W
Published: SPIE,
Publication Dates: c2003.
Call Number: TN405.7-532/E89/2003

Book

19

Cover is for reference only

Metrology, inspection, and process control for microlithography XVII：24-27 February, 2003, Santa Clara, California, USA

Corporate Authors: Semiconductor Equipment and Materials International; International SEMATECH; Society of Photo-Optical Instrumentation Engineers
Group Author: Herr Daniel J. C
Published: SPIE,
Publication Dates: c2003.
Call Number: TN405.7-532/M594/2003/v.1

Book

20

Cover is for reference only

Process and materials characterization and diagnostics in IC manufacturing：27-28 February 2003, Santa Clara, California, USA

Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Tobin Kenneth W; Emami Iraj
Published: SPIE,
Publication Dates: c2003.
Call Number: TN40-532/P963/2003

Book

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