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Rapid thermal and integrated processing VI：symposium held April 1-4, 1997, San Francisco, California, U.S.A.

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Bibliographic Details
Corporate Authors: Materials Research Society
Group Author: Riley Terrence J
Published: Materials Research Society,
Publisher Address: Pittsburgh, Pa.
Publication Dates: c1997.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 470
Subjects:
Semiconductor doping > Congresses
Vapor-plating > congresses
Rapid thermal processing > Congresses
Semiconductors > Heat treatment > Congresses
Carrier Form: xi, 434 p.: ill. ; 24 cm.
ISBN: 1558993746
Index Number: TN305
CLC: TN305-532
Call Number: TN305-532/R218/1997/
Contents: Includes bibliographic references and indexes.

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