Reset Filters
LC: L - Education

Cover is for reference only

Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II

Saved in:
Bibliographic Details
Corporate Authors: (2nd : 1997; Electrochemical Society. Meeting 1997 Paris, France); Electrochemical Society. Electronics Division.; 1997 Paris, France); (1997 Paris, France)
Group Author: Kolbesen Bernd O.
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1997.
Literature type: Book
Language: English
Series: Proceedings ; v. 97-22
Subjects:
Contamination (Technology)
Integrated circuits > Very large scale integration > Congresses.
Crystals > Defects.
Carrier Form: x, 517 p.: ill. ; 23 cm.
ISBN: 1566771757
Index Number: TN470
CLC: TN470.5-532
Call Number: TN470.5-532/S989/1997/
Contents: "This ... volume contains the 13 invited papers, 21 of 22 contributed papers and 10 papers presented as poster at the Second Symposium on 'Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing' which was part 01B of the
Includes bibliographical references and indexes.

Related Book Recommendations